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Orientador(es)
Resumo(s)
The technological evolution in the last century also required an evolution of materials and
coatings. Therefore, it was necessary to make mechanical components subject to heavy wear more
reliable, improving their mechanical strength and durability. Surfaces can contribute decisively to
extending the lifespan of mechanical components. Chemical vapor deposition (CVD) and physical
vapor deposition (PVD) technologies have emerged to meet the new requirements that have enabled
a remarkable improvement in the morphology, composition and structure of films as well as an
improved adhesion to the substrate allowing a greater number of diversified applications. Thin films
deposition using PVD coatings has been contributing to tribological improvement, protecting their
surfaces from wear and corrosion, as well as enhancing their appearance. This process can be an
advantage over other processes due to their excellent properties and environmental friendly behavior,
which gives rise to a large number of studies in mathematical modelling and numerical simulation,
like finite element method (FEM) and computational fluid dynamics (CFD). This review intends to
contribute to a better PVD process knowledge, in the fluids and heat area, using CFD simulation
methods focusing on the process energy efficiency improvement regarding the industrial context
with the sputtering technique.
Descrição
Palavras-chave
CFD simulation FEM simulation Rreactor Physical vapor deposition Coating Numerical modelling