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Ti-Zr-Nb-(V) refractory alloy coatings deposited by highpower impulse magnetron sputtering: Structure, mechanical properties, oxidation resistance, and thermal stability

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Abstract(s)

A series of TiZrNb(V) high entropy alloy-based metallic coatings have been deposited using high-power impulse magnetron sputtering (HiPIMS), with variable V concentrations and constant ratios among the other metals. The coatings were analyzed regarding their composition, surface and cross-sectional morphologies, microstructure, roughness, mechanical properties, oxidation resistance, and thermal stability. The structure of the deposited coatings reveals a transition from the bcc crystal structure to an amorphous phase as the V concentration increases. The addition of V also led to a decrease in roughness Ra and an improvement in adhesion, while it did not affect hardness, which remained at ∼10–11 GPa for all samples. Annealing under a protective atmosphere at 400 °C caused structural ordering, which was followed by an increase in mechanical properties. The purpose of the present paper is, therefore, to present a study on the deposition of TiZrNb coatings with increasing V concentration prepared by HiPIMS and to understand the role of V concentration on their structure, chemical composition, mechanical properties, and oxidation resistance. Comparison of the results with those achieved for a reference TiZrNb coating is presented too.

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Keywords

Elastic modulus Alloys Amorphous materials Materials properties Mechanical properties Atomic force microscopy Magnetron sputtering X-ray diffraction

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Citation

Fraile, A., Cavaleiro, D., Bondarev, A., Middleburgh, S.C., Lee, W.E., &, Fernades, F. (Nov./Dec. 2024).Ti-Zr-Nb-(V) refractory alloy coatings deposited by highpower impulse magnetron sputtering: Structure, mechanical properties, oxidation resistance, and thermal stability. J. Vac. Sci. Technol. A 42(6). https:\\doi.org\10.1116/6.0003864

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AIP Publishing

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