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Zirconium aluminum nitride thin films for temperature sensing applications

2025-01-31Artigo de investigação Acesso aberto
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datacite.subject.fosEngenharia e Tecnologia::Engenharia Mecânica
datacite.subject.sdg09:Indústria, Inovação e Infraestruturas
dc.contributor.authorFernandes, Filipe
dc.contributor.authorMartins, Bruno
dc.contributor.authorPatacas, Carlos
dc.contributor.authorCavaleiro, Albano
dc.contributor.authorFaia, Pedro
dc.contributor.authorAlves, Cristiana F. Almeida
dc.contributor.authorCarbo-Argibay, Enrique
dc.contributor.authorFerreira, Paulo J.
dc.date.accessioned2026-02-11T14:06:19Z
dc.date.available2026-02-11T14:06:19Z
dc.date.issued2025-01-31
dc.description.abstractThis study explores the development and characterization of zirconium aluminum nitride (ZrAlN) thin films produced via magnetron sputtering for temperature sensing applications. The sensor film is integrated into a fully nitride multilayer coating and designed to work in harsh environments. The ZrAlN demonstrated stable semiconductor behavior up to 750 °C, making it suitable for high-temperature thermistors, with a β value of approximately 850 K after signal stabilization. Detailed structural characterization confirmed a mixed-phase structure of poorly crystalline cubic ZrN and orthorhombic Zr3N4. This structure is believed to be responsible for the high resistivity of 8.0 × 105 µΩ·cm observed in Zr1-xAlxN with x = 0.3. The examination of Zr0.7Al0.3N integrated into the multilayer coating revealed a columnar morphology with diffuse nanolayers, alternating between aluminum-rich and aluminum-poor zones, caused by the two-fold rotational deposition. The sensor coating was further tested on a cutting tool substrate, with the Zr0.7Al0.3N layer exhibiting a sensitivity of 800 K and demonstrating effective temperature measurements up to 400 °C. The Zr0.7Al0.3N layer inserted in a nitride-based multilayer coating, combined with Arduino® for signal acquisition, resulted in a measured error of approximately 7 %. The setup presented the potential for integration into manufacturing environments aligned with Industry 4.0.eng
dc.description.sponsorshipThis research is sponsored by national funds: Soft4Sense Project “Smart Surfaces for Reliable Tooling Integration” (Reference: POCI-01-0247-FEDER-045921), co-financed by the European Regional Development Fund, through Portugal 2020 (PT2020), by the Competitiveness and Internationalization Operational Program (COMPETE 2020) and Foundation for Science and Technology (FCT) is also acknowledged. This research is also sponsored by national funds through FCT, under Projects UIDB/00285/2020 and LA/P/0112/2020. The authors also acknowledge the FCT for its financial support via the project LAETA Base Funding (https://doi.org/10.54499/UIDB/50022/2020), and the PRR Drivolution – Factory of the Future Model (reference: C644913740- 00000022).
dc.identifier.citationBruno Martins, Carlos Patacas, Albano Cavaleiro, Pedro Faia, Cristiana F. Almeida Alves, Enrique Carbo-Argibay, Paulo J. Ferreira, Filipe Fernandes, Zirconium aluminum nitride thin films for temperature sensing applications, Journal of Alloys and Compounds, Volume 1013, 2025, 178546, https://doi.org/10.1016/j.jallcom.2025.178546
dc.identifier.doihttps://doi.org/10.1016/j.jallcom.2025.178546
dc.identifier.issn0925-8388,
dc.identifier.urihttp://hdl.handle.net/10400.22/31823
dc.language.isoeng
dc.peerreviewedyes
dc.publisherElsevier
dc.relationCentre for Mechanical Enginnering, Materials and Processes
dc.relation.hasversionhttps://www.sciencedirect.com/science/article/pii/S0925838825001045?via%3Dihub
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/
dc.subjectNTC thin-film thermistor
dc.subjectMagnetron sputtering
dc.subjectZr1-xAlxN thin films
dc.subjectMultilayer coating
dc.subjectTemperature sensing
dc.subjectIndustry 4.0
dc.titleZirconium aluminum nitride thin films for temperature sensing applicationseng
dc.typeresearch article
dspace.entity.typePublication
oaire.awardTitleCentre for Mechanical Enginnering, Materials and Processes
oaire.awardURIinfo:eu-repo/grantAgreement/FCT/6817 - DCRRNI ID/UIDB%2F00285%2F2020/PT
oaire.citation.issue178546
oaire.citation.titleJournal of Alloys and Compounds
oaire.citation.volume1013
oaire.fundingStream6817 - DCRRNI ID
oaire.versionhttp://purl.org/coar/version/c_970fb48d4fbd8a85
person.familyNameFernandes
person.givenNameFilipe
person.identifier995468
person.identifier.ciencia-id2113-A18B-EEE8
person.identifier.orcid0000-0003-4035-3241
person.identifier.scopus-author-id55644767300
project.funder.identifierhttp://doi.org/10.13039/501100001871
project.funder.nameFundação para a Ciência e a Tecnologia
relation.isAuthorOfPublicationf3fb450f-5f22-4f0c-8916-7742d519f6af
relation.isAuthorOfPublication.latestForDiscoveryf3fb450f-5f22-4f0c-8916-7742d519f6af
relation.isProjectOfPublicatione9972dd7-ceaf-49ee-959a-d2a0e393b124
relation.isProjectOfPublication.latestForDiscoverye9972dd7-ceaf-49ee-959a-d2a0e393b124

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