Publication
Can ZrAlN thin films be used as thermistor sensors for temperature assessment?
| datacite.subject.fos | Engenharia e Tecnologia | |
| datacite.subject.sdg | 09:Indústria, Inovação e Infraestruturas | |
| dc.contributor.author | Martins, Bruno | |
| dc.contributor.author | Patacas, Carlos | |
| dc.contributor.author | Cavaleiro, Albano | |
| dc.contributor.author | Faia, Pedro | |
| dc.contributor.author | Bondarchuk, Oleksandr | |
| dc.contributor.author | Fernandes, Filipe | |
| dc.date.accessioned | 2025-01-30T15:34:16Z | |
| dc.date.available | 2025-01-30T15:34:16Z | |
| dc.date.issued | 2024 | |
| dc.description.abstract | The electrical characteristics and conduction mechanisms of ZrAlN thin films for their potential use as thermistor sensors were assessed. Various compositions of Zr1-xAlxN were synthesized by sputtering and studied up to 200 °C to understand their sensitivity and applicability. Among the compositions studied, the ones with x = 0.34 and x = 0.46 showed the highest sensitivities, reaching values close to 3000 K. However, the thermo-resistive properties exhibited by these compositions limited their utilization above 100 °C. Zr1-xAlxN film compositions with x higher than 0.46 showed amorphous structures and were found to be insulative. Composition with x = 0.26, within the cubic phase, showed the most promising electrical properties regarding temperature sensing in the studied range. XPS analysis of this composition confirmed the presence of Zr-N and Al-N bonds, with a Zr3+ oxidation state, which suggests the availability of a free electron contributing to the electrical conduction. Impedance measurements performed at different temperatures for this composition revealed the dominant role of the grain boundaries in the conduction mechanism, based upon electron hopping between grains, overcoming the energy barrier imposed by the grain boundaries. ZrAlN thin films demonstrate negative temperature coefficient (NTC) thermistor behavior, expanding their applications beyond protective coatings to temperature monitoring. | eng |
| dc.description.sponsorship | This research is sponsored by national funds: Soft4Sense project “Smart Surfaces for Reliable Tooling Integration" (reference: POCI-01-0247-FEDER-045921), co-financed by the European Regional Development Fund, through Portugal 2020 (PT2020), by the Competitiveness and Internationalization Operational Programme (COMPETE 2020) and Foundation for Science and Technology (FCT) is also acknowledged. This research is also sponsored by national funds through FCT, under projects UIDB/00285/2020 and LA/P/0112/2020. | |
| dc.identifier.citation | Bruno Martins, Carlos Patacas, Albano Cavaleiro, Pedro Faia, Oleksandr Bondarchuk, Filipe Fernandes, Can ZrAlN thin films be used as thermistor sensors for temperature assessment?, Journal of Science: Advanced Materials and Devices, Volume 9, Issue 2, 2024, 100676, ISSN 2468-2179, https://doi.org/10.1016/j.jsamd.2024.100676. | |
| dc.identifier.doi | 10.1016/j.jsamd.2024.100676 | |
| dc.identifier.issn | 2468-2179 | |
| dc.identifier.uri | http://hdl.handle.net/10400.22/29342 | |
| dc.language.iso | eng | |
| dc.peerreviewed | yes | |
| dc.publisher | VNU | |
| dc.relation | Centre for Mechanical Enginnering, Materials and Processes | |
| dc.relation.hasversion | https://www.sciencedirect.com/science/article/pii/S2468217924000078 | |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/4.0/ | |
| dc.subject | NTC thin-film thermistor | |
| dc.subject | Reactive sputtering | |
| dc.subject | Nitride semiconductors | |
| dc.subject | Impedance spectroscopy | |
| dc.subject | Temperature sensing | |
| dc.title | Can ZrAlN thin films be used as thermistor sensors for temperature assessment? | eng |
| dc.type | journal article | |
| dspace.entity.type | Publication | |
| oaire.awardTitle | Centre for Mechanical Enginnering, Materials and Processes | |
| oaire.awardURI | info:eu-repo/grantAgreement/FCT/6817 - DCRRNI ID/UIDB%2F00285%2F2020/PT | |
| oaire.citation.issue | 2 | |
| oaire.citation.title | Journal of Science: Advanced Materials and Devices | |
| oaire.citation.volume | 9 | |
| oaire.fundingStream | 6817 - DCRRNI ID | |
| oaire.version | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |
| project.funder.identifier | http://doi.org/10.13039/501100001871 | |
| project.funder.name | Fundação para a Ciência e a Tecnologia | |
| relation.isProjectOfPublication | e9972dd7-ceaf-49ee-959a-d2a0e393b124 | |
| relation.isProjectOfPublication.latestForDiscovery | e9972dd7-ceaf-49ee-959a-d2a0e393b124 |