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Expanding the applications of the wear-resistant titanium aluminum nitride thin-film to include temperature sensing

2024Journal article Open access
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datacite.subject.fosEngenharia e Tecnologia
datacite.subject.sdg09:Indústria, Inovação e Infraestruturas
dc.contributor.authorMartins, Bruno
dc.contributor.authorPatacas, Carlos
dc.contributor.authorCavaleiro, Albano
dc.contributor.authorFaia, Pedro
dc.contributor.authorZorro, Fátima
dc.contributor.authorCarbo-Argibay, Enrique
dc.contributor.authorFGerreira, Paulo J.
dc.contributor.authorFernandes, Filipe
dc.contributor.authorFernandes, Filipe
dc.date.accessioned2025-01-30T10:32:09Z
dc.date.available2025-01-30T10:32:09Z
dc.date.issued2024
dc.description.abstractThis study investigates an approach to temperature sensing by integrating Titanium Aluminum Nitride (TiAlN), originally engineered for wear and corrosion applications, as a temperature sensor within a multilayered thin film system. A nitride multilayer system was developed by physical vapor deposition (PVD) using a single four-target magnetron sputtering chamber; intermediate vacuum interruption steps were employed for masking procedures. The multilayer architecture design aimed to provide the sensor layer with mechanical protection and electrical shielding. Structural and electrical characterization of the TiAlN single layer revealed semiconductor behavior and stable electrical resistance up to 750 °C, with minimal signal stabilization requirements. Despite the higher Al content, the TiAlN temperature sensor exhibited a cubic crystal structure characterized by diffuse nanolayers, resulting from a two-fold rotational deposition and target configuration. A detailed examination of the multilayer system cross-section containing the TiAlN sensor was conducted using scanning transmission electron microscopy (STEM). The analysis revealed its columnar morphology with the presence of typical PVD growth defects, including voids and droplets. While the presence of these defects may impact the electrical characteristics of the sensor, the selected experimental conditions effectively maintained the structural integrity of the multilayer system despite the vacuum interruptions caused by masking procedures. Validation experiments confirmed the functionality of the multilayer system for temperature measurements up to 400 °C. The signal acquisition system addressed room temperature resistance variations and low sensitivity (thermistor coefficient ∼100 K), resulting in a measured error of approximately 6%. This study demonstrates promising results of TiAlN as a temperature sensor within a multilayered system, expanding its range of potential applications.eng
dc.description.sponsorshipThis research is sponsored by national funds: Soft4Sense project “Smart Surfaces for Reliable Tooling Integration” (reference: POCI-01-0247-FEDER-045921), co-financed by the European Regional Development Fund, through Portugal 2020 (PT2020), by the Competitiveness and Internationalization Operational Programme (COMPETE 2020) and Foundation for Science and Technology (FCT) is also acknowledged. This research is also sponsored by national funds through FCT, under projects UIDB/00285/2020, LA/P/0112/2020 and LAETA Base Funding (DOI: 10.54499/UIDB/50022/2020).
dc.identifier.citationBruno Martins, Carlos Patacas, Albano Cavaleiro, Pedro Faia, Fátima Zorro, Enrique Carbo-Argibay, Paulo J. Ferreira, Filipe Fernandes, Expanding the applications of the wear-resistant titanium aluminum nitride thin-film to include temperature sensing, Journal of Science: Advanced Materials and Devices, Volume 9, Issue 2, 2024, 100716, ISSN 2468-2179, https://doi.org/10.1016/j.jsamd.2024.100716.
dc.identifier.doi10.1016/j.jsamd.2024.100716
dc.identifier.issn2468-2179
dc.identifier.urihttp://hdl.handle.net/10400.22/29334
dc.language.isoeng
dc.peerreviewedyes
dc.publisherVNU
dc.relationCentre for Mechanical Enginnering, Materials and Processes
dc.relation.hasversionhttps://www.sciencedirect.com/science/article/pii/S2468217924000479
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/
dc.subjectNTC thin-film thermistor
dc.subjectMagnetron sputtering
dc.subjectNitride semiconductors
dc.subjectMultilayer coating
dc.subjectTemperature sensing
dc.titleExpanding the applications of the wear-resistant titanium aluminum nitride thin-film to include temperature sensingeng
dc.typejournal article
dspace.entity.typePublication
oaire.awardTitleCentre for Mechanical Enginnering, Materials and Processes
oaire.awardURIinfo:eu-repo/grantAgreement/FCT/6817 - DCRRNI ID/UIDB%2F00285%2F2020/PT
oaire.citation.issue2
oaire.citation.titleJournal of Science: Advanced Materials and Devices
oaire.citation.volume9
oaire.fundingStream6817 - DCRRNI ID
oaire.versionhttp://purl.org/coar/version/c_970fb48d4fbd8a85
person.familyNameFernandes
person.givenNameFilipe
person.identifier1496760
person.identifier.ciencia-id501E-7C9D-D56D
person.identifier.orcid0000-0002-2931-8536
person.identifier.scopus-author-id57222077374
project.funder.identifierhttp://doi.org/10.13039/501100001871
project.funder.nameFundação para a Ciência e a Tecnologia
relation.isAuthorOfPublicationb78fe6d2-f2ce-4210-9775-642c73a268fa
relation.isAuthorOfPublication.latestForDiscoveryb78fe6d2-f2ce-4210-9775-642c73a268fa
relation.isProjectOfPublicatione9972dd7-ceaf-49ee-959a-d2a0e393b124
relation.isProjectOfPublication.latestForDiscoverye9972dd7-ceaf-49ee-959a-d2a0e393b124

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