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Cu2ZnSn(S,Se)4 (CZTSSe) is a potentially cost effective candidate for future thin film solar cells (TFSCs). We report the growth of CZTSSe using a hybrid process involving the sequential evaporation of Zn and sputtering of the sulfide precursors of Cu and Sn, followed by a selenization step. Two approaches for selenization were followed, one using a tubular furnace (TF) and the other using a Rapid Thermal Processor (RTP). SEM and EDS were employed to investigate the morphology and composition of the films. Structural analyses were done using XRD and Raman spectroscopy. Structural analyses revealed the formation of CZTSSe. The effects of annealing conditions on the morphological and structural properties of the films were investigated.