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Design of DC semi-industrial magnetron-sputtered W-Ti-N/Ag composite films: Insights into the microstructure and mechanical properties
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Orientador(es)
Resumo(s)
A semi-industrial magnetron sputtering system was employed to deposit a series of W-Ti-N/Ag composite films with varying Ag content, aiming to provide practical parameters for industrial-scale PVD applications. The films were deposited by DC sputtering a W + 30 wt%Ti alloy target and an Ag target in an Ar and N2 atmosphere. The results indicated that the composite films, regardless of Ag content, exhibited a face-centered cubic (fcc) structure and consisted of a three-phase mixture of W2N, TiN and Ag. The Ag particles were embedded within the crystalline grains of solid solution of (WTi)2N and (TiW)N, resulting in grain refinement and increased interface density in the films. The predominant cross-section fracture of the Ag-alloyed was identified as transgranular. Both hardness and elastic modulus of the composite films gradually decreased with the Ag content due to the soft nature of the Ag phase.
Descrição
Palavras-chave
DC magnetron sputtering system W-Ti-N/Ag composite films Microstructure Mechanical properties
Contexto Educativo
Citação
Jing Luan, Yiping Wang, Songtao Dong, Manuel Evaristo, Filipe Fernandes, Albano Cavaleiro, Hongbo Ju, Design of DC semi-industrial magnetron-sputtered W-Ti-N/Ag composite films: Insights into the microstructure and mechanical properties, Surface and Coatings Technology, Volume 502, 2025, 131942, ISSN 0257-8972, https://doi.org/10.1016/j.surfcoat.2025.131942
Editora
Elsevier