Effect of peak power on microstructure, mechanical and tribological properties of W-Ti-C-N(O) ceramic films produced by hybrid sputtering

Ataie, S.A.; Soltanieh, M.; Naghizadeh, R.; Cavaleiro, A.; Fernandes, F.; Ferreira, F.

http://hdl.handle.net/10400.22/24591

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This research investigates the impact of peak power (from 44 to 105 kW) on the structural and tribological properties of W-Ti-C-N(O) films. Chemical analysis of the coatings, using energy-dispersive spectroscopy and Raman spectroscopy, indicates that increasing target power results in a rise in the oxygen (from 2.6 to 12.0 at%), carbon (from 19.7 to 32.4 at%), and sp3 (from 9.8% to 24.3%) content. Morphological and topographical analysis reveal that an increase in target power causes a transition from a columnar structure (with nodular grains) to a dense structure (with textured grains). The indentation and dry sliding tests demonstrate that the maximum level of H/E2 (0.00047 GPa-1) is achieved, along with a low wear rate of 8.1 × 10-7 mm3/N.m.