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Resumo(s)
ZnO films doped with vanadium (ZnO:V) have been prepared by dc reactive magnetron sputtering
technique at different substrate temperatures (RT–500 C). The effects of the substrate temperature
on ZnO:V films properties have been studied. XRD measurements show that only ZnO polycrystalline
structure has been obtained, no V2O5 or VO2 crystal phase can be observed. It has been
found that the film prepared at low substrate temperature has a preferred orientation along the (002)
direction. As the substrate temperature is increased, the (002) peak intensity decreases. When
the substrate temperature reaches the 500 C, the film shows a random orientation. SEM measurements
show a clear formation of the nano-grains in the sample surface when the substrate
temperature is higher than 400 C. The optical properties of the films have been studied by measuring
the specular transmittance. The refractive index has been calculated by fitting the transmittance
spectra using OJL model combined with harmonic oscillator.
Descrição
Palavras-chave
Zinc Oxide Vanadium Oxide Thin Films Sputtering Optical Properties
Contexto Educativo
Citação
Editora
American Scientific Publishers