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Advisor(s)
Abstract(s)
A evolução da tecnologia tem contribuído para o desenvolvimento da sociedade e
os semicondutores surgiram num contexto onde é possível produzir dispositivos eletrónicos cada vez mais pequenos e complexos. No processo produtivo de semicondutores, pode-se identificar as seguintes etapas: Crescimento do cristal de silício,
corte e laminação de discos designados por wafers, limpeza para remover conta minantes, dopagem para modificar as propriedades elétricas, litografia para definir
padrões dos circuitos, gravura para remover as camadas indesejadas, implantação
iónica para ajustar as características elétricas e corte da wafer.
No processo de fabrico de semicondutores, existem tarefas que têm de ser rea lizadas por engenheiros antes de seguirem para o cliente, como a análise de dados
paramétricos obtidos nos teste das wafers. A análise, por norma, é feita através de
wafermaps, que são representações gráficas usadas na indústria de semicondutores
para visualizar e analisar resultados paramétricos, fornecendo uma representação visual dos chips individuais, chamados dies. Esse processo de análise manual por um
engenheiro, onde tem que abrir um ficheiro de resultados, selecionar os parâmetros
a analisar, introduzi-los num gráfico e depois efetuar um estudo analítico, pode-se
tornar uma tarefa morosa e dispendiosa de recursos.
Este trabalho aborda o desenvolvimento de uma aplicação que será usada na
etapa de análise da dados paramétricos. O software tem como principal objetivo
ajudar o engenheiro na deteção de falhas de fabrico de wafers. No processo de
desenvolvimento da aplicação, foram realizadas várias iterações com a equipa de
engenheiros, até que esta fosse de encontro ao pretendido pela equipa.
Ao longo de todo o processo de criação da interface, todas as funcionalidades
foram validades de forma a comprovar o seu correto funcionamento. Para avaliar a
solução final, foi realizado um inquérito de usabilidade aos utilizadores da aplicação,
a fim de compreender se a aplicação desenvolvida ia de encontro aos objetivos dos
utilizadores da mesma.
Por fim, pode-se concluir que a aplicação desenvolvida permite efetuar uma aná lise de dados paramétricos através do estudo de um gradiente de cores no formato
de wafermap.
The evolution of technology has contributed to the development of society, and semi conductors have emerged in a context where it is possible to produce increasingly smaller and more complex electronic devices. In the semiconductor production pro cess, the following stages can be identified: Growth of the silicon crystal, cutting and slicing of discs called wafers, cleaning to remove contaminants, doping to modify elec trical properties, lithography to define circuit patterns, etching to remove unwanted layers, ion implantation to adjust electrical characteristics, and wafer cutting. In the semiconductor manufacturing process, there are tasks that need to be performed by engineers before they are sent to the customer, such as analyzing parametric data obtained from wafer testing. Typically, this analysis is done using wafermaps, which are graphical representations used in the semiconductor industry to visualize and analyze parametric results, providing a visual representation of individual chips, called dies. This manual analysis process by an engineer, where they have to open a results file, select the parameters to analyze, input them into a graph, and then perform an analytical study, can become a time-consuming and resource-intensive task. This work addresses the development of an application that will be used in the parametric data analysis stage. The software’s main objective is to assist the engi neer in detecting wafer manufacturing faults. During the application development process, several iterations were carried out with the team of engineers until it met the team’s requirements. Throughout the entire interface creation process, all functionalities were vali dated to ensure their correct functioning. To evaluate the final solution, a usability survey was conducted with the application’s users to understand if the developed application met their objectives. In conclusion, the developed application allows for the analysis of parametric data through the study of a color gradient in the wafermap format.
The evolution of technology has contributed to the development of society, and semi conductors have emerged in a context where it is possible to produce increasingly smaller and more complex electronic devices. In the semiconductor production pro cess, the following stages can be identified: Growth of the silicon crystal, cutting and slicing of discs called wafers, cleaning to remove contaminants, doping to modify elec trical properties, lithography to define circuit patterns, etching to remove unwanted layers, ion implantation to adjust electrical characteristics, and wafer cutting. In the semiconductor manufacturing process, there are tasks that need to be performed by engineers before they are sent to the customer, such as analyzing parametric data obtained from wafer testing. Typically, this analysis is done using wafermaps, which are graphical representations used in the semiconductor industry to visualize and analyze parametric results, providing a visual representation of individual chips, called dies. This manual analysis process by an engineer, where they have to open a results file, select the parameters to analyze, input them into a graph, and then perform an analytical study, can become a time-consuming and resource-intensive task. This work addresses the development of an application that will be used in the parametric data analysis stage. The software’s main objective is to assist the engi neer in detecting wafer manufacturing faults. During the application development process, several iterations were carried out with the team of engineers until it met the team’s requirements. Throughout the entire interface creation process, all functionalities were vali dated to ensure their correct functioning. To evaluate the final solution, a usability survey was conducted with the application’s users to understand if the developed application met their objectives. In conclusion, the developed application allows for the analysis of parametric data through the study of a color gradient in the wafermap format.
Description
Keywords
Semiconductors Application Wafer Colour Gradient